FEI Helios Nanolab SEM/FIB

The FEI Helios NanoLab is a Dual Beam microscope combining a field emission SEM and an advanced FIB. The Helios was installed at the end of 2007.

Facilities available on this instrument include:

Oxford Instruments EBSD and large area EDX detector

Pt, Teos, Carbon Deposition

Backscattered electron detector

STEM detector

Omniprobe