FEI Nova NanoSEM

FEI Nova NanoSEM is an analytical FEGSEM designed for high-performance imaging, EBSD and EDX and routine analysis of materials including imaging, chemical mapping and orientation mapping.

The instrument features beam deceleration capability of 50 eV to 30 keV (with stage biasing) and a low vacuum capability with associated dedicated low vacuum SE and BS detectors. There are Everhart-Thornley and through-the-lens (TTL) SE detectors, and detectors for backscattered electrons including in-lens type and dedicated multi-segment, retractable high sensitivity BS detector for low-voltage imaging.

It has a Bruker electron backscatter diffraction (EBSD) camera and associated analysis software and a silicon Drift Detector Energy Dispersive X-ray spectrometer with high solid angle and high count rate capability.

Facilities available on this instrument include:

Simultaneous EBSD and EDX acquisition (high vacuum and low vacuum)

An integrated plasma cleaner and a cryo-can anti-contaminator

A retractable multi-segment STEM detector allowing low kv STEM imaging